Toshio Hiroe

Title: The Innovations of Toshio Hiroe

Introduction

Toshio Hiroe is a notable inventor based in Hazukashi, Japan. He has made significant contributions to the field of microelectromechanical systems (MEMS). His work focuses on advancing technologies that enhance cleaning systems through innovative designs.

Latest Patents

Hiroe holds a patent for a microelectromechanical system megasonic transducer. This invention provides megasonic cleaning systems and methods of fabricating and using the same. The system comprises a plurality of MEMS transducers, each featuring a movable membrane with a membrane electrode. This design is coupled to a first potential and is spaced apart from an upper surface of a die that includes a cavity electrode coupled to a second potential. The membrane consists of multiple layers, including a polysilicon layer situated between a top silicon nitride layer and a bottom silicon nitride layer. The membrane electrode incorporates the polysilicon layer, and the system also includes a chuck for positioning a target workpiece and a fluid to couple sonic energy from the MEMS transducers to the workpiece.

Career Highlights

Toshio Hiroe is associated with Silicon Light Machines Corporation, where he continues to innovate in the field of MEMS technology. His work has been instrumental in developing advanced cleaning systems that leverage the unique properties of megasonic waves.

Collaborations

Hiroe has collaborated with notable colleagues, including Zarem Harold and Alexander P. Payne. Their combined expertise has contributed to the successful development of innovative technologies in their field.

Conclusion

Toshio Hiroe's contributions to the field of microelectromechanical systems exemplify the spirit of innovation. His patented technologies are paving the way for advancements in cleaning systems, showcasing the importance of research and collaboration in driving progress.