Toshimasa Tanaka

Title: Toshimasa Tanaka: Innovator in Processing Apparatus Technology

Introduction

Toshimasa Tanaka is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of processing apparatus technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and reliability of processing systems used in various industries.

Latest Patents

Toshimasa Tanaka's latest patents include innovative technologies that improve processing apparatus functionality. The first patent, titled "Processing apparatus and process status checking method," describes a processing apparatus that features a processing chamber, gas supply paths, and valves. This apparatus includes a measuring unit that assesses physical parameters associated with process gases, a register unit for storing these parameters, and a control unit that determines process status based on the stored data. The design allows for effective communication between a lower-hierarchy control device and a higher-hierarchy control unit, ensuring precise control over the processing operations.

The second patent, "Processing apparatus and valve operation checking method," outlines a processing apparatus designed to accommodate target objects for processing. This invention includes gas supply paths and valves that can be independently driven and monitored. The control unit determines the operational status of the valves based on drive signals and detection signals, enhancing the reliability of the processing system.

Career Highlights

Toshimasa Tanaka is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing processing technologies that are critical for modern manufacturing processes.

Collaborations

Toshimasa has collaborated with notable colleagues, including Katsuhito Hirose and Toshio Miyazawa. Their combined expertise has contributed to the development of innovative solutions in the field of processing apparatus technology.

Conclusion

Toshimasa Tanaka's contributions to processing apparatus technology through his patents and collaborations highlight his role as a significant innovator in the industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.