Location History:
- Oume, JP (1998)
- Hitachinaka, JP (2009 - 2013)
Company Filing History:
Years Active: 1998-2013
Title: Toshihiko Onozuka: Innovator in Semiconductor Technology
Introduction
Toshihiko Onozuka is a prominent inventor based in Hitachinaka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving the performance and reliability of semiconductor devices.
Latest Patents
One of his latest patents involves a semiconductor device and its manufacturing method. This innovation aims to decrease capacitance between copper interconnections while simultaneously improving insulation breakdown. The manufacturing method includes several steps, such as forming an interconnection containing copper as a main ingredient in an insulative film above a substrate. It also involves creating insulative films and a barrier insulative film for a reservoir pattern. Additionally, it features an insulative film that suppresses or prevents copper diffusion on the upper and lateral surfaces of the interconnection. The process further includes forming insulative films of low dielectric constant, ensuring that the deposition rate above the opposing lateral surfaces of the interconnections is greater than that below, thereby creating an air gap between adjacent interconnections. Finally, the insulative film is planarized through interlayer CMP.
Career Highlights
Toshihiko Onozuka is currently employed at Hitachi, Ltd., where he continues to advance semiconductor technology. His innovative approaches have positioned him as a key figure in the industry.
Collaborations
Throughout his career, Onozuka has collaborated with notable colleagues, including Junji Noguchi and Takashi Matsumoto. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Toshihiko Onozuka's contributions to semiconductor technology exemplify the impact of innovation in enhancing device performance and reliability. His ongoing work at Hitachi, Ltd. continues to shape the future of the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.