Location History:
- Kanagawa, JP (1995)
- Tsukui-gun, JP (1997)
Company Filing History:
2 out of 80 
2 out of 44 
Years Active: 1995-1997
Title: Toshiaki Miyaju: Innovator in Heat Treatment Technology
Introduction
Toshiaki Miyaju is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of heat treatment technology, particularly in the semiconductor industry. With a total of 2 patents, his innovations have enhanced the efficiency and accuracy of heat treatment processes.
Latest Patents
Miyaju's latest patents include a heat treating apparatus and a heat treating device. The heat treating apparatus is designed for mounting objects to be treated on a wafer boat, which is placed within a heat insulating cylinder. This apparatus features a temperature detecting sensor located in a film depositing area, allowing for precise temperature control during heat treatment. The improved heat response ensures accurate temperature detection for the objects being treated.
The heat treating device, on the other hand, includes a processing vessel that exposes semiconductor wafers held in a wafer boat to heat treatment. It incorporates processing gas introduction nozzles and a cap for tightly closing the processing vessel. The design of the heat retention cylinder allows for the introduction of processing gases, maintaining high intra-plane film thickness uniformity without the need to rotate the wafer boat.
Career Highlights
Throughout his career, Toshiaki Miyaju has worked with prominent companies in the semiconductor industry, including Tokyo Electron and Tokyo Electron Tohoku. His experience in these organizations has contributed to his expertise in heat treatment technologies.
Collaborations
Miyaju has collaborated with notable colleagues such as Toshimitsu Shibata and Naoya Kaneda. Their combined efforts have further advanced the field of heat treatment technology.
Conclusion
Toshiaki Miyaju's contributions to heat treatment technology have made a significant impact on the semiconductor industry. His innovative patents reflect his dedication to improving processes and ensuring precision in heat treatment applications.