Itami, Japan

Tooru Koyama


Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 1990-1992

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2 patents (USPTO):Explore Patents

Title: Tooru Koyama: Innovator in Photo-Resist Technology

Introduction

Tooru Koyama is a notable inventor based in Itami, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of photo-resist materials. With a total of 2 patents to his name, Koyama's work has had a lasting impact on the industry.

Latest Patents

Koyama's latest patents include innovative formulations of positive type o-quinone diazide photo-resist containing an antistatic agent. This antistatic photo-resist is designed to minimize charge accumulation, making it suitable for use as a mask in ion implantation into semiconductor substrates. Another significant patent is the positive quinone diazide photo-resist composition with an antistatic agent, which shares similar benefits and applications in semiconductor manufacturing.

Career Highlights

Throughout his career, Tooru Koyama has worked with prominent companies such as Mitsubishi Denki Kabushiki Kaisha and Mitsubishi Chemical Industries Limited. His experience in these organizations has allowed him to refine his expertise in photo-resist technology and contribute to advancements in the field.

Collaborations

Koyama has collaborated with esteemed colleagues, including Konoe Miura and Tameichi Ochiai. These partnerships have fostered innovation and have been instrumental in the development of new technologies in the semiconductor industry.

Conclusion

Tooru Koyama's contributions to photo-resist technology and his innovative patents have established him as a key figure in the semiconductor field. His work continues to influence advancements in technology and manufacturing processes.

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