This inventor holds 1 USPTO granted patent. Top assignee: Kabushiki Kaisha Toshiba. Active years: 1996.
Company Filing History:
Years Active: 1996
Title: The Innovations of Tooru Koike
Introduction
Tooru Koike is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of charged beam technology. His work focuses on enhancing the accuracy of drawing patterns on samples using charged beams.
Latest Patents
Tooru Koike holds a patent for a "Charged Beam Drawing Apparatus." This invention allows for the precise drawing of desired patterns on a sample by deflecting a charged beam while continuously moving the stage on which the sample is placed. The apparatus forms a mark with a line-and-space pattern, consisting of heavy metal marks arranged with equal spaces. By detecting a reflected beam from the mark, the apparatus measures relative vibrations during the continuous movement of the stage, thereby increasing drawing accuracy.
Career Highlights
Tooru Koike is associated with Kabushiki Kaisha Toshiba, a leading technology company. His work at Toshiba has allowed him to develop innovative solutions that push the boundaries of charged beam technology. His contributions have been instrumental in advancing the capabilities of drawing apparatuses.
Collaborations
Tooru Koike has collaborated with notable coworkers, including Ichiro Mori and Yuji Takigami. Their combined expertise has fostered an environment of innovation and creativity within their projects.
Conclusion
Tooru Koike's work exemplifies the spirit of innovation in the field of charged beam technology. His patent for the charged beam drawing apparatus showcases his commitment to enhancing precision in technological applications. His contributions continue to influence advancements in this area.