Tooru Kawashima

Title: Tooru Kawashima: Innovator in Detection and Lithography Technologies

Introduction

Tooru Kawashima is a prominent inventor based in Shioya-gun, Japan. He has made significant contributions to the fields of detection apparatus and lithography technologies. With a total of 4 patents to his name, Kawashima's work has advanced the capabilities of precision manufacturing and detection systems.

Latest Patents

Kawashima's latest patents include a detection apparatus and a lithography apparatus, along with an article manufacturing method. The detection apparatus is designed to identify position deviations between an original and a substrate. It features an illumination optical system that illuminates a first diffraction grating on the original and a second diffraction grating on the substrate. The detection optical system then detects interference light formed by the diffracted light from both gratings. This innovative approach utilizes dipole illumination, ensuring that the polarization directions of the light beams incident on the substrate are orthogonal to each other.

Another notable invention is a detector that measures the relative positions of two objects on a predetermined plane. This device includes an illumination optical system that illuminates marks on both objects and a detection optical system that captures the interference light from these marks. The design allows for a light intensity distribution that enhances detection accuracy while blocking non-interference light.

Career Highlights

Tooru Kawashima is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has positioned him as a key player in the development of advanced detection and lithography technologies. His innovative contributions have not only improved existing systems but have also paved the way for future advancements in the field.

Collaborations

Kawashima has collaborated with notable colleagues, including Yasuyuki Unno and Kenji Yaegashi. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Tooru Kawashima's contributions to detection and lithography technologies exemplify the spirit of innovation. His patents reflect a commitment to advancing precision in manufacturing processes. Through his work at Canon and collaborations with esteemed colleagues, Kawashima continues to influence the field significantly.