Tomoyuki Kurata

Title: Tomoyuki Kurata: Innovator in Gas Supply Structures

Introduction

Tomoyuki Kurata is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of gas supply structures, particularly in the context of substrate processing apparatuses. His innovative work has led to the development of a patent that addresses critical challenges in the industry.

Latest Patents

Tomoyuki Kurata holds a patent for a gas supply structure designed to suppress damage to non-metallic materials, such as quartz, used in reaction tubes. The patent, titled "Gas supply structure and substrate processing apparatus," includes a gas supply nozzle that facilitates the introduction of process gas into a process chamber. It features a first seal to cover gaps between the reaction tube and the gas supply nozzle, a holder that maintains a gap between the nozzle and itself, and an adapter connected to the holder. Additionally, the design incorporates a first fixing structure to secure the holder and adapter, along with a second seal to ensure an airtight space between the gas supply nozzle and the adapter.

Career Highlights

Tomoyuki Kurata is currently employed at Kokusai Electric Corporation, where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the efficiency and reliability of gas supply systems in various applications.

Collaborations

Throughout his career, Tomoyuki has collaborated with various professionals, including his coworker, Atsushi Hirano. These collaborations have contributed to the successful development and implementation of innovative solutions in the field.

Conclusion

Tomoyuki Kurata's contributions to gas supply structures exemplify the importance of innovation in technology. His patent and ongoing work at Kokusai Electric Corporation highlight his commitment to advancing the industry.