Amagasaki, Japan

Tomoyuki Kanda


Average Co-Inventor Count = 12.2

ph-index = 3

Forward Citations = 110(Granted Patents)


Location History:

  • Tokyo, JP (1998)
  • Amagasaki, JP (1995 - 1999)

Company Filing History:


Years Active: 1995-1999

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4 patents (USPTO):Explore Patents

Title: Tomoyuki Kanda: Innovator in Semiconductor Technology

Introduction

Tomoyuki Kanda is a notable inventor based in Amagasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of semiconductor production processes.

Latest Patents

Kanda's latest patents include a semiconductor producing apparatus and a wafer vacuum chucking device. The wafer vacuum chucking device is designed to securely hold a wafer even when dust particles are present on its surface. This innovation features a main body with multiple block grooves, each equipped with vacuum evacuation paths. This design ensures that the wafer remains securely held, even if the vacuum in one of the grooves decreases due to dust attachment. Additionally, Kanda has developed a compact washing apparatus that effectively cleans dirt in a short time. This device utilizes a high-speed jet stream to wash down dirt, enhancing the cleaning process.

Career Highlights

Tomoyuki Kanda is associated with Mitsubishi Denki Kabushiki Kaisha, a leading company in the electronics and semiconductor industry. His work has been instrumental in advancing technologies that are crucial for modern electronic devices.

Collaborations

Kanda has collaborated with notable coworkers such as Shigeo Sasaki and Yoshimi Kinoshita. Their combined expertise has contributed to the successful development of innovative technologies in the semiconductor field.

Conclusion

Tomoyuki Kanda's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor production and cleaning technologies.

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