Tomoyuki Azuma

Title: The Innovations of Tomoyuki Azuma

Introduction

Tomoyuki Azuma is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing and semiconductor device production. With a total of 3 patents to his name, Azuma's work has had a considerable impact on the industry.

Latest Patents

One of his latest patents is a substrate processing apparatus and substrate processing method. This apparatus includes a first processing chamber and a second processing chamber, along with a first substrate holding unit that holds a substrate in the first processing chamber. It features a chemical solution supply unit that supplies a chemical solution containing an etching component and a thickening agent to the substrate held by the first substrate holding unit. Additionally, a substrate transfer unit transfers the substrate from the first processing chamber to the second processing chamber while the chemical solution is held on the substrate. The second substrate holding unit holds multiple substrates in the second processing chamber, each with the chemical solution.

Another significant patent is a method of cleaning and a process for producing semiconductor devices. This method involves removing metal compounds attached to a substrate's surface by supplying a supercritical fluid of carbon dioxide that includes triallylamine and tris(3-aminopropyl)amine. This innovative cleaning method efficiently removes etching and polishing residues containing metal compounds, thereby improving the reliability of the wiring and increasing the yield of semiconductor devices.

Career Highlights

Throughout his career, Tomoyuki Azuma has worked with prominent companies such as Mitsubishi Gas Chemical Company, Inc. and Sony Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in substrate processing and semiconductor technology.

Collaborations

Some of his notable coworkers include Koichiro Saga and Kenji Yamada. Their collaboration has likely contributed to the advancements in the projects they have worked on together.

Conclusion

Tomoyuki Azuma's contributions to substrate processing and semiconductor device production are noteworthy. His innovative patents and career achievements reflect his dedication to advancing technology in his field.