Company Filing History:
Years Active: 2006
Title: Innovations in Semiconductor Technology: The Contributions of Tomonori Mori
Introduction: Tomonori Mori is a notable inventor based in Gunma, Japan, recognized for his contribution to the field of semiconductor manufacturing. His innovative approach has led to the development of a method that addresses vital challenges in production efficiency and material reliability in semiconductor devices.
Latest Patents: Mori holds a patent for a pioneering manufacturing method of semiconductor devices. This patent focuses on an LDD structure and a silicide layer formation without compromising the thickness of the silicon substrate or introducing carbon contamination. His method employs a two-step process—dry-etching followed by wet-etching—to form a spacer on the sidewall of the gate electrode. Additionally, the removal of a silicon nitride film, used as a buffer film for high dose impurity injection, is achieved through wet-etching, which prevents thickness reduction and contamination. As a result, Mori's technique ensures that variation in impurity concentration regions and silicide forming regions on the wafer is minimized, thanks to the high selection ratio available through wet-etching.
Career Highlights: Tomonori Mori is currently employed at Sanyo Electric Co., Ltd., where he applies his expertise in semiconductor technologies. Throughout his career, he has been dedicated to enhancing the efficiency and quality of semiconductor manufacturing processes, reflecting a deep commitment to technological advancement.
Collaborations: In his role at Sanyo Electric Co., Ltd., Mori collaborates closely with esteemed colleagues, including Katsuhiko Iizuka and Kazuo Okada. This collaborative effort showcases the power of teamwork in driving innovation and overcoming the challenges faced in semiconductor device manufacturing.
Conclusion: Tomonori Mori's contributions to semiconductor technology through his innovative patent are a testament to his skill as an inventor. His work not only addresses critical industry challenges but also paves the way for future advancements in semiconductor manufacturing. As technology continues to evolve, the impact of Mori's innovations will likely resonate within the industry for years to come.