Company Filing History:
Years Active: 2013-2015
Title: Tomohiro Noda: Innovator in Coating Treatment Technologies
Introduction
Tomohiro Noda is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of coating treatment methods, holding a total of 2 patents. His innovative approaches have the potential to enhance various industrial applications.
Latest Patents
Noda's latest patents focus on a sophisticated coating treatment method. In this method, a substrate is rotated at a first rotation number during the first step. The rotation of the substrate is then decelerated to 1500 rpm, which serves as the second rotation number, and the substrate is maintained at this speed for 0.5 seconds. Following this, the substrate is further decelerated to a third rotation number and rotated accordingly. Finally, the rotation is accelerated to a fourth rotation number, where the substrate continues to rotate. Throughout this process, a resist solution is continuously supplied to the center portion of the substrate from the middle of the first step to the middle of the third step. This innovative method is also detailed in his patent for a computer storage medium and coating treatment apparatus.
Career Highlights
Tomohiro Noda is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this organization has allowed him to develop and refine his innovative coating treatment technologies.
Collaborations
Noda collaborates with notable colleagues, including Katsunori Ichino and Koji Takayanagi. Their combined expertise contributes to the advancement of technologies in their field.
Conclusion
Tomohiro Noda's contributions to coating treatment methods exemplify his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving industrial processes, making him a noteworthy figure in the realm of inventions.