Company Filing History:
3 out of 49 
2 out of 1,111 
Years Active: 2015-2017
Title: Tomohiro Goto: Innovative Mind from Kyoto
Introduction
Tomohiro Goto is a prominent inventor based in Kyoto, Japan, recognized for his significant contributions to substrate processing technology. With a total of five patents under his name, Goto has been at the forefront of innovations that enhance the efficiency and effectiveness of substrate treatment processes.
Latest Patents
Among his latest inventions, Goto's patented technologies include a "Substrate Processing Apparatus" and a "Coating Method and Coating Apparatus." The substrate processing apparatus focuses on eliminating development failures that can occur during the drying of substrates. It achieves this by utilizing a DI water discharge nozzle that scans while the substrate is spun, ensuring that the dried area spreads uniformly over the whole surface of the substrate.
His coating method involves forming a thicker film of coating solution in the center of the substrate, which is then evenly distributed toward the edges as the substrate is rotated. This innovative approach not only makes the film thickness uniform but also enhances the smoothness of the film's surface, pushing the boundaries of coating technology.
Career Highlights
Tomohiro Goto has made remarkable advancements while working with companies such as Screen Semiconductor Solutions Co., Ltd. and Screen Holdings Co., Ltd. His experience and knowledge in semiconductor equipment and material processing have significantly impacted the industry.
Collaborations
Throughout his career, Goto has collaborated with talented individuals, including Masakazu Sanada and Kazuhito Shigemori. These collaborations have likely contributed to the depth and success of his inventions, as creating innovative solutions often requires a synergy of ideas and expertise.
Conclusion
In conclusion, Tomohiro Goto is a visionary inventor whose work in substrate processing and coating technologies reflects a strong commitment to innovation. His patents are essential contributions that pave the way for advancements in the semiconductor industry, and his collaborations further amplify his impact on technology development.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.