The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Aug. 29, 2007
Tomohiro Goto, Kyoto, JP;
Masakazu Sanada, Kyoto, JP;
Kazuhito Shigemori, Kyoto, JP;
Osamu Tamada, Kyoto, JP;
Shuichi Yasuda, Kyoto, JP;
Tomohiro Goto, Kyoto, JP;
Masakazu Sanada, Kyoto, JP;
Kazuhito Shigemori, Kyoto, JP;
Osamu Tamada, Kyoto, JP;
Shuichi Yasuda, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A method capable of eliminating occurrence of a development failure when a DI water discharge nozzleis scanned to dry a substrate by spinning is provided. A substrate W is held in a horizontal posture by a spin chuckand rotated about a vertical axis by a rotation motor, and when an outlet of the nozzleis scanned from a position opposed to a center of the substrate W to a position opposed to a circumferential edge while a cleaning solution being discharged, immediately after the nozzlehas started to move, only one dried core is produced in the vicinity of the center of the substrate W, and thus production of not less than two dried cores in the vicinity of the center of the substrate W is prevented. The dried region is spread all over the surface of the substrate W.