Company Filing History:
Years Active: 2009
Title: **Tomoharu Okuno: Innovator in Extreme Ultraviolet Light Technology**
Introduction
Tomoharu Okuno, based in Suita, Japan, is an accomplished inventor known for his contributions to the field of extreme ultraviolet (EUV) light sources. With a focus on enhancing emission efficiency, Okuno's work plays a crucial role in advancing technology associated with EUV lithography.
Latest Patents
Okuno holds a notable patent for an "Extreme Ultraviolet Light Source and Extreme Ultraviolet Light Source Target." This invention aims to enhance the emission of extreme ultraviolet light using a solid target made of heavy metal or heavy-metal compounds. The unique target design features a density ranging from 0.5 to 80% of the crystal density, allowing for better control over the plasma generated when irradiated by a laser beam. This innovation results in improved emission efficiency while minimizing energy loss, particularly when utilizing materials like SnO, which achieves a higher emission efficiency compared to traditional Sn crystal targets.
Career Highlights
Throughout his career, Tomoharu Okuno has dedicated himself to research and innovation within the realm of advanced light sources. His patent work has positioned him prominently in the scientific community, showcasing his commitment to improving the functionality of high-tech devices reliant on EUV light.
Collaborations
Okuno has collaborated with esteemed colleagues, including Keiji Nagai and Hiroaki Nishimura, who have contributed to the advancement of his innovative ideas and research. Their partnership underlines the collaborative nature of technological advancements in higher education and research institutions.
Conclusion
As a pioneering inventor at Osaka University, Tomoharu Okuno has made significant strides in the field of extreme ultraviolet light technology. His innovative patent highlights his dedication to enhancing emission efficiency, which is vital for the continued development of high-tech applications and industries. Okuno's work represents a melding of scientific insight and practical engineering, making a lasting impact on the future of photonic research.