Company Filing History:
Years Active: 1998-2010
Title: Tomoaki Muramatsu: Innovator in Semiconductor Coating Technologies
Introduction
Tomoaki Muramatsu is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of coating technologies. With a total of 3 patents, his work focuses on methods that enhance the efficiency and effectiveness of coating processes.
Latest Patents
Muramatsu's latest patents include innovative methods for forming coatings and manufacturing semiconductor devices. One of his key inventions is a method for forming a liquid coating on a substrate. This method reduces the consumption of coating liquid while achieving a more uniform thickness of the liquid coating film. The process involves supplying a solvent to the substrate's surface, initiating the coating liquid supply while rotating the substrate at a specific speed, and then decelerating the rotation to stop the supply of the coating liquid. This technique effectively minimizes the dispense amount of the coating liquid and flattens the film thickness.
Another significant invention is an apparatus for spin coating, which is designed for forming resist films, SOG films, and polyimide films in semiconductor device manufacturing. This apparatus includes a rotatable table for placing a wafer, a coating solution discharging means positioned above the table, and a solvent discharging means that can dissolve the coating solution. The goal of this invention is to create a coated film with a specified and uniform thickness, even when the amount of discharged coating solution is minimal.
Career Highlights
Throughout his career, Muramatsu has worked with prominent companies such as Fujitsu Corporation and Fujitsu Microelectronics Limited. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.
Collaborations
Some of his notable coworkers include Takashi Yoshida and Kenji Kikuchi. Their collaboration has likely contributed to the advancements in the technologies that Muramatsu has developed.
Conclusion
Tomoaki Muramatsu is a distinguished inventor whose work in semiconductor coating technologies has led to significant advancements in the field. His innovative methods and apparatuses continue to influence the manufacturing processes in the semiconductor industry.