Tom Ni

Title: The Innovative Contributions of Tom Ni

Introduction

Tom Ni, an accomplished inventor based in Pleasanton, CA, boasts an impressive portfolio of five patents. His work focuses on advancements in plasma processing and semiconductor technology, demonstrating his commitment to innovation in the field.

Latest Patents

Among his latest patents, Ni has developed a "Plasma confinement apparatus and method for confining a plasma." This invention comprises a series of electrically insulated components strategically arranged around a processing region of a plasma processing apparatus. These components create a defined space with multiple passageways, while an additional electrically conductive and grounded component forms an electrical field shielding for the processing environment.

Another notable patent is the "Method and apparatus for detecting planarization of metal films prior to clearing." This invention provides a systematic approach to planarizing a semiconductor substrate, starting with tracking a signal that reflects the thickness of a conductive film on the substrate. Ni's method involves calculating a second derivative from this data to identify the onset of planarization, thereby enabling a transition monitoring within a Chemical Mechanical Planarization (CMP) operation.

Career Highlights

Throughout his career, Tom Ni has made significant strides in the industry. He has collaborated with renowned companies such as Lam Research Corporation and Advanced Micro-Fabrication Equipment, Inc. in Asia. His time at these organizations has allowed him to further refine his expertise and contribute to groundbreaking technologies.

Collaborations

Ni has worked alongside esteemed colleagues, including Brian K. McMillin and Michael S. Barnes. These collaborations have not only influenced his innovations but have also propelled advancements in semiconductor processing and plasma technologies.

Conclusion

Tom Ni’s contributions to the field of innovation are marked by his notable patents and collaborative efforts. His work in plasma confinement and semiconductor technology continues to influence advancements in these critical areas. As he continues to push the boundaries of innovation, the impact of his discoveries is sure to resonate throughout the industry.