Tom Kelly

Title: The Innovations of Tom Kelly

Introduction

Tom Kelly is an accomplished inventor based in Milpitas, California. He has made significant contributions to the field of wafer processing technology. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of wafer processing.

Latest Patents

Tom Kelly holds a patent for a "Wafer processing apparatus and method." This invention describes a method and apparatus for transferring processing structures between first and second processing environments. The apparatus includes two compartments designed to provide distinct processing environments, coupled together through a transfer passage. This design allows for the isolation of wafers in a small transfer volume, ensuring that they are exposed to the necessary conditions without compromising the integrity of the processing environments. The apparatus is particularly effective for processing wafers coated with silicon-based materials to produce porous low-k coatings.

Career Highlights

Throughout his career, Tom Kelly has demonstrated a commitment to innovation in the semiconductor industry. His work at Semix Incorporated has positioned him as a key player in advancing wafer processing technologies. His patent reflects his expertise and dedication to improving manufacturing processes.

Collaborations

Tom has collaborated with talented individuals such as Khanh Q Tran and Arin Chang. Their combined efforts have contributed to the success of various projects within the company.

Conclusion

Tom Kelly's contributions to wafer processing technology exemplify the spirit of innovation. His patent and work at Semix Incorporated highlight his role as a leading inventor in the field.