This inventor holds 3 USPTO granted patents. Top assignee: Kawasaki Steel Corporation. Active years: 1993-1994.
Company Filing History:
Years Active: 1993-1994
Title: Tohru Mitomo: Innovator in Chemical Vapor Deposition
Introduction
Tohru Mitomo is a distinguished inventor based in Chiba, Japan. He has made significant contributions to the field of chemical vapor deposition, holding a total of 3 patents. His work focuses on enhancing deposition rates and improving film quality, particularly in semiconductor production.
Latest Patents
Mitomo's latest patents include a photochemical vapor deposition process aimed at increasing deposition rates and improving film quality. This innovative process utilizes a pulse laser beam in conjunction with continuous light to promote photolysis of the source gas. Additionally, he has developed a chemical vapor deposition method for forming thin films, such as diamond, on heated substrates. This apparatus features a substrate supporting structure, a heater for precise temperature control, and a cooling device to maintain optimal conditions during the deposition process.
Career Highlights
Tohru Mitomo is currently employed at Kawasaki Steel Corporation, where he continues to advance his research and development efforts. His expertise in chemical vapor deposition has positioned him as a key figure in the industry, contributing to the production of high-quality semiconductor materials.
Collaborations
Mitomo has collaborated with notable colleagues, including Tomohiro Ohta and Eiichi Kondoh, to further enhance the capabilities and applications of his inventions.
Conclusion
Tohru Mitomo's innovative work in chemical vapor deposition has made a lasting impact on the semiconductor industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.