Ting-Hsien Ko

Title: Innovations by Inventor Ting-Hsien Ko

Introduction

Ting-Hsien Ko is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 3 patents, his work focuses on enhancing the efficiency and effectiveness of photomask cleaning and pellicle removal processes.

Latest Patents

Ting-Hsien Ko's latest patents include a dis-pellicle tool or pellicle removal tool. This tool features one or more clamp structures, each equipped with a group of pins designed to be inserted into holes within a pellicle frame. Once the pins are in place, a removal force can be applied to detach the pellicle from a photomask, which is typically adhered using glue or similar materials. Another significant patent is a cleaning apparatus for photomasks. This apparatus consists of a housing that defines a chamber, a photomask holder, and a gas dispenser that directs gas toward the holder. The gas dispenser is equipped with multiple outlets, and a driver facilitates relative movement between the holder and the gas dispenser.

Career Highlights

Ting-Hsien Ko is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in developing tools and methods that improve the manufacturing process of semiconductors.

Collaborations

Some of his notable coworkers include Chih-Wei Wen and Chung-Hung Lin, who have collaborated with him on various projects within the company.

Conclusion

Ting-Hsien Ko's innovative contributions to the semiconductor industry, particularly in pellicle removal and photomask cleaning, highlight his expertise and commitment to advancing technology. His patents reflect a deep understanding of the challenges in semiconductor manufacturing and offer practical solutions to enhance efficiency.