Ting-Cheong Ang

Title: Ting-Cheong Ang: Innovator in Semiconductor Manufacturing

Introduction

Ting-Cheong Ang is a prominent inventor based in Singapore, known for his contributions to semiconductor manufacturing. He has been instrumental in developing innovative methods that enhance the efficiency and performance of interconnect structures in integrated circuits. With a total of 2 patents, his work has significantly impacted the field of electronics.

Latest Patents

Ting-Cheong Ang's latest patents include a method for fabricating an air gap shallow trench isolation (STI) structure. This method involves manufacturing a shallow trench isolation with an air gap formed by decomposing an organic filler material through a cap layer. The process includes forming a trench in the substrate, applying liner layers, and utilizing plasma to vaporize the filler material, ultimately creating an insulating layer.

Another notable patent is the method for fabricating an air gap metallization scheme that reduces inter-metal capacitance of interconnect structures. This method focuses on creating a metallization scheme with an air gap by vaporizing a filler polymer material. The process begins with forming spaced conductive lines over a semiconductor structure, followed by the application of a permeable dielectric layer that allows the vapor phase filler material to diffuse and create gaps between the conductive lines.

Career Highlights

Ting-Cheong Ang has made significant strides in his career at Chartered Semiconductor Manufacturing Ltd. His innovative approaches to semiconductor technology have positioned him as a key figure in the industry. His work not only enhances the performance of semiconductor devices but also contributes to the advancement of manufacturing techniques.

Collaborations

Throughout his career, Ting-Cheong Ang has collaborated with notable colleagues, including Young-Way Teh and Alex See. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in semiconductor manufacturing.

Conclusion

Ting-Cheong Ang's contributions to the field of semiconductor manufacturing through his innovative patents and collaborative efforts highlight his importance as an inventor. His work continues to influence the industry and pave the way for future advancements in technology.