Location History:
- Eden, VT (US) (2000)
- Johnson, VT (US) (2001 - 2002)
Company Filing History:
Years Active: 2000-2002
Title: Innovations by Timothy Scott Bullard
Introduction
Timothy Scott Bullard is an accomplished inventor based in Johnson, Vermont, known for his contributions to semiconductor technology. He holds a total of 3 patents that focus on improving the efficiency and effectiveness of post-CMP (Chemical Mechanical Planarization) cleaning processes.
Latest Patents
One of his latest patents is a "Post CMP cleaning method using a brush cleaner with torque monitor." This innovative method describes a technique for detecting the presence of a brush used in a semiconductor wafer cleaner during post-CMP processing. The process involves loading semiconductor wafers into a wet environment, where they are affixed to a rotatable fixture and rotated at high speed. A servo motor linked to a servo controller and a torque monitor calculates the torque on the rotating wafer before and during the brush cleaning cycle. If the torque remains unchanged, it indicates that the brush is not making contact with the wafer, prompting the user to reaffix the brush. This invention helps in detecting inadequate removal of CMP residue before entire wafer lots undergo ineffective cleaning.
Another significant patent by Bullard is the "Post CMP clean brush with torque monitor," which shares similar principles and applications as the previous patent. This apparatus and method also focus on ensuring effective cleaning of semiconductor wafers by monitoring torque changes during the cleaning process.
Career Highlights
Timothy Scott Bullard is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of semiconductor technology. His work has significantly contributed to advancements in the efficiency of wafer cleaning processes.
Collaborations
Throughout his career, Bullard has collaborated with notable colleagues, including Gary Joseph Beardsley and Cuc Kim Huynh, who have also made significant contributions to the field.
Conclusion
Timothy Scott Bullard's innovative patents and contributions to semiconductor technology highlight his expertise and commitment to improving industry standards. His work continues to influence the efficiency of post-CMP cleaning processes, making a lasting impact in the field.