Timothy K Minton

Title: Innovations in Semiconductor Etching by Timothy K Minton

Introduction

Timothy K Minton is a notable inventor based in Pasadena, CA. He has made significant contributions to the field of semiconductor technology. His work focuses on enhancing the etching processes used in semiconductor manufacturing.

Latest Patents

Minton holds a patent for a groundbreaking invention titled "Semiconductor etching by hyperthermal neutral beams." This patent describes an at-least dual chamber apparatus and method that utilizes high flux beams of fast-moving neutral reactive species. These beams are created, collimated, and employed to etch semiconductor or metal materials from the surface of a workpiece. The use of halogen atoms in the beams allows for anisotropic etching with good selectivity at satisfactory etch rates. This innovative approach minimizes surface damage and undercutting, making it a valuable advancement in the field.

Career Highlights

Timothy K Minton is affiliated with the California Institute of Technology, where he continues to push the boundaries of semiconductor research. His work has garnered attention for its potential to improve manufacturing processes in the semiconductor industry.

Collaborations

Minton collaborates with Konstantinos P Giapis, a fellow researcher who shares his passion for advancing semiconductor technologies.

Conclusion

Timothy K Minton's contributions to semiconductor etching represent a significant advancement in the field. His innovative patent and ongoing research at the California Institute of Technology highlight his commitment to improving technology in semiconductor manufacturing.