This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Innovations by Tim Casper in Remote Plasma Cleaning Technology
Introduction
Tim Casper is an accomplished inventor based in Monte Sereno, CA. He has made significant contributions to the field of processing chamber cleaning methods. His innovative approach utilizes microwave energy to enhance cleaning efficiency in various applications.
Latest Patents
Tim Casper holds a patent for a "Remote plasma cleaning method for processing chambers." This method involves the use of microwave energy to generate reactive species that can effectively remove deposits from processing chambers. The technology allows for cleaning at different pressures and utilizes varying ratios of reactive and inert gases to optimize the cleaning process. This innovation not only improves the uniformity of cleaning but also increases the cleaning rate and enhances the residence time of reactive species.
Career Highlights
Tim Casper is associated with Applied Materials, Inc., a leading company in the semiconductor and display industries. His work has contributed to advancements in cleaning technologies that are crucial for maintaining the performance of processing equipment.
Collaborations
Tim has collaborated with notable colleagues such as Ravi Rajagopalan and Patricia M Liu. Their combined expertise has furthered the development of innovative solutions in the field.
Conclusion
Tim Casper's contributions to remote plasma cleaning technology exemplify the impact of innovative thinking in the processing industry. His patent and collaborative efforts continue to influence advancements in cleaning methods for processing chambers.