Thomas Schumann

Title: Innovations of Thomas Schumann in Semiconductor Temperature Measurement

Introduction

Thomas Schumann, an accomplished inventor based in Dresden, Germany, has made significant strides in the field of thermally treating substrates, particularly semiconductor wafers. With a focus on precision and efficiency, his work is exemplified by his innovative patent that addresses crucial aspects of temperature measurement in substrate processing.

Latest Patents

Schumann holds a patent for a "Device for determining the temperature of a substrate." This apparatus is designed to accurately measure temperature during the heating process of a semiconductor wafer. The invention utilizes a first radiation source to apply heat to the substrate, while a unique grating structure, which is opaque to a substantial portion of the radiation, helps in controlling the heating process. The apparatus includes a drive unit for moving the grating structure and a radiation detector positioned to monitor the substrate's surface. By determining the emitted radiation based on the substrate's temperature, this innovative device paves the way for enhanced thermal treatment processes.

Career Highlights

Thomas Schumann is affiliated with Centrotherm Thermal Solutions GmbH & Co. KG, where he contributes his expertise to the development of innovative thermal solutions. His background and focus on semiconductor technology position him as a valuable asset in advancing the company's objectives in the semiconductor manufacturing industry.

Collaborations

Throughout his career, Schumann has had the opportunity to collaborate with esteemed colleagues, including Denise Reichel and Wilfried Lerch. Their collective efforts foster an environment of innovation, driving advancements in the technologies associated with substrate treatment.

Conclusion

Thomas Schumann's innovative contributions to substrate temperature measurement highlight his dedication to enhancing semiconductor manufacturing processes. His patented inventions serve as a testament to his skill and ingenuity in addressing complex challenges in the field. Through collaboration with talented coworkers and his association with Centrotherm Thermal Solutions GmbH & Co. KG, Schumann continues to make a lasting impact on the industry.