Thomas S Latos

Title: Innovations of Thomas S. Latos

Introduction

Thomas S. Latos is an accomplished inventor based in Carpenterville, IL (US). He holds a total of 2 patents that showcase his expertise in advanced technologies related to plasma etching and sputter deposition.

Latest Patents

Latos's latest patents include a "Method and apparatus for controlling plasma etching." This invention provides a method for controlling plasma etching processes by directing coherent light onto the surface being etched. The change in reflectivity of the surface upon exposure of the underlying substrate produces a detectable change in the characteristics of the reflected light. A derivative detector with a variable timer samples the reflected light continuously, providing a control signal to terminate the plasma etch process before an overetch condition occurs. This method can detect the desired endpoint of etching through various materials, including insulation and metal substrates.

Another significant patent is the "Method and apparatus for monitoring and controlling sputter deposition." This system monitors sputtering deposition parameters and achieves rapid modification of these parameters through closed-loop control. The sputtering chamber features individual gas pressure controllers for various gases, and a holder for the substrate includes a heater with adjustable control. A differentially pumped quadrupole mass analyzer measures the ionized species in the plasma and generates signals related to the film composition. The controller adjusts the pressure of reactive or non-reactive gases and controls other deposition parameters to maintain the desired film composition.

Career Highlights

Thomas S. Latos is currently employed at Gould Inc., where he applies his innovative ideas to enhance technology in the field of materials processing. His work has significantly contributed to advancements in plasma etching and sputter deposition techniques.

Collaborations

Latos collaborates with Thomas C. Tisone, leveraging their combined expertise to drive innovation in their projects.

Conclusion

Thomas S. Latos is a notable inventor whose contributions to plasma etching and sputter deposition have advanced the field of materials processing. His patents reflect a commitment to innovation and excellence in technology.