Thomas Richard Harry

Title: Innovations of Thomas Richard Harry

Introduction

Thomas Richard Harry is an accomplished inventor based in Trenton, NJ (US). He holds a total of 2 patents that showcase his expertise in the field of integrated circuit fabrication. His work has significantly contributed to advancements in manufacturing processes.

Latest Patents

One of his latest patents is titled "Active neural network control of wafer attributes in a plasma etch." This invention is based on the premise that an emission trace from a plasma glow used in fabricating integrated circuits contains critical information about phenomena that cause variations in the fabrication process. These variations can include factors such as the age of the plasma reactor, densities of the wafers exposed to the plasma, chemistry of the plasma, and concentration of the remaining material. The patent discloses a method for utilizing neural networks to determine plasma etch end-point times in an integrated circuit fabrication process. The end-point time is derived from in-situ monitoring of the optical emission trace, and the back-propagation method is employed to train the network. More broadly, the neural network can regulate control variables and materials in a manufacturing process to produce an output product with desired quality attributes. An identified process signature reflecting the relationship between the quality attribute and the process can be used to train the neural network.

Career Highlights

Throughout his career, Thomas Richard Harry has worked with notable companies such as AT&T Corp. and Lucent Technologies Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas in the field of technology.

Collaborations

Some of his coworkers include Robert Charles Frye and Earl Ryan Lory. Their collaboration has likely contributed to the successful development of various projects and innovations.

Conclusion

Thomas Richard Harry's contributions to the field of integrated circuit fabrication through his patents and collaborations highlight his significant role as an inventor. His work continues to influence advancements in manufacturing processes.