Thomas M Parrill

Title: **Thomas M. Parrill: Innovator in Semiconductor Technology**

Introduction

Thomas M. Parrill is a distinguished inventor based in North Andover, MA, primarily known for his contributions to the field of semiconductor technology. With a total of two patents to his name, Parrill has made significant strides in enhancing the efficiency and selectivity of processes in semiconductor manufacturing.

Latest Patents

Parrill's latest inventions include two groundbreaking patents that address critical challenges in semiconductor device fabrication. The first patent, titled "Selective nitride etching with silicate ion pre-loading," introduces a novel method of nitride wet etching. In this process, liquid TEOS (Tetraethyl Orthosilicate) is introduced directly into a hot phosphoric acid bath before wafer etching begins. This innovative approach ensures that the bath chemistry is pre-loaded with silicate ions, leading to exceptionally high selectivity to silicon oxides.

The second patent, "Method for trench isolation of semiconductor devices," presents a unique technique for removing excess oxide from active areas after shallow trench isolation. This method eliminates the need for chemical-mechanical polishing by utilizing a nitride mask that protects active areas while etching isolation trenches. The trenches, filled with oxide through high-density plasma deposition, are designed to simultaneously etch while providing a sloping contour around the isolation trenches. A patterned etch on a further nitride cap layer ensures selective removal of excess oxide, which can subsequently be followed by the removal of nitride layers.

Career Highlights

Thomas M. Parrill is currently employed at Texas Instruments Corporation, where he has applied his expertise to drive innovation in semiconductor design and fabrication. His deep understanding of etching processes has made him an invaluable asset to the company and the broader field of semiconductor technology.

Collaborations

Throughout his career, Parrill has collaborated with several noteworthy professionals, including his colleagues Der'E Jan and Brian Keith Kirkpatrick. These collaborations have allowed for the exchange of ideas and expertise, further enhancing the innovative environment at Texas Instruments Corporation.

Conclusion

Thomas M. Parrill exemplifies the spirit of innovation in the semiconductor industry. His patents reflect a commitment to improving the efficiency and effectiveness of semiconductor processes, positioning him as a leading inventor in this critical field. As technology continues to evolve, his contributions will undoubtedly play a significant role in shaping the future of semiconductor manufacturing.