Company Filing History:

5 out of 9,364

Lucent Technologies Inc.

patents

2 out of 3,345

At&t Bell Laboratories

Agere Systems Guardian Corp.

patents

Years Active: 1994-2002

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6500591 - Method of averaging focus through scattered energy determination (2002-12-31),

2. 6284413 - Method of manufacturing semicustom reticles using reticle primitives and reticle exchanger (2001-09-04),

3. 6225639 - Method of monitoring a patterned transfer process using line width metrology (2001-05-01),

4. 6192290 - System and method of manufacturing semicustom integrated circuits using reticle primitives from a library and interconnect reticles (2001-02-20),

5. 5989764 - Method of adjusting lithography tool through scattered energy measurement (1999-11-23),

6. 5981119 - Lithography tool adjustment and semiconductor integrated circuit (1999-11-09),

7. 5968693 - Lithography tool adjustment utilizing latent imagery (1999-10-19),

8. 5532192 - Method of spiral resist deposition (1996-07-02),

9. 5395803 - Method of spiral resist deposition (1995-03-07),

10. 5362585 - Seimconductor integrated circuit fabrication utilizing latent imagery (1994-11-08),

11. 5334541 - Method of fabricating an integrated circuit with lines of critical width (1994-08-02),

Title: The Innovative Contributions of Thomas Evans Adams

Introduction

Thomas Evans Adams is a notable inventor based in Emmaus, PA, with a remarkable portfolio of 11 patents. His work primarily focuses on advancements in lithography and optical technologies, which have significant implications in the semiconductor industry.

Latest Patents

Among his latest patents is a method of averaging focus through scattered energy determination. This innovative approach aims to achieve optimal stepper focus and exposure across an entire wafer for a specific mask level before initiating a product run. The method also facilitates the characterization of lens field curvature and astigmatism, while checking for optical column tilt. By analyzing scattered light from latent images, the process ensures accurate exposure and focus, minimizing the complexities associated with resist development.

Another significant patent is the method of manufacturing semicustom reticles using reticle primitives and a reticle exchanger. This system allows for the efficient production of semicustom reticles for integrated circuits. It includes a library of reticle primitives and exposure equipment that utilizes these primitives to create patterns on the semicustom reticle in a single lithographic step.

Career Highlights

Throughout his career, Thomas has worked with prominent companies such as Lucent Technologies Inc. and AT&T Bell Laboratories. His contributions to these organizations have been instrumental in advancing their technological capabilities.

Collaborations

Thomas has collaborated with notable coworkers, including Thomas S. Frederick and Scott Jessen, further enhancing the innovative environment in which he operates.

Conclusion

Thomas Evans Adams stands out as a significant figure in the field of invention, particularly in lithography and optical technologies. His patents reflect a commitment to innovation that continues to influence the semiconductor industry.

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