Company Filing History:
Years Active: 2000-2003
Title: Thomas Boonstra: Innovator in Integrated Circuit Technology
Introduction
Thomas Boonstra is a notable inventor based in Minneapolis, MN (US). He has made significant contributions to the field of integrated circuit technology, holding 2 patents that focus on methods for monitoring defects in semiconductor processes. His work is essential for ensuring the reliability and efficiency of electronic devices.
Latest Patents
Boonstra's latest patents include innovative methods for forming contact monitors and analyzing contact-, via-, and trench-forming processes in integrated circuits. These methods involve creating a sacrificial topology on a substrate, which duplicates a portion of the device's structure while using materials that are free of elemental silicon. The process includes etching the sacrificial topology, removing parts of it, and inspecting the substrate with a wafer surface inspection tool. This technique allows for the detection of defects in the formation of contact holes, vias, and trenches, ensuring that the actual devices are formed correctly.
Career Highlights
Thomas Boonstra is currently employed at Cypress Semiconductor Corporation, where he continues to advance his research and development efforts in semiconductor technology. His work has been instrumental in improving the manufacturing processes of integrated circuits, contributing to the overall advancement of the electronics industry.
Collaborations
Boonstra has collaborated with notable colleagues, including Edward M. Shamble and David J. Brownell. Their combined expertise has fostered innovation and development in the field of semiconductor technology.
Conclusion
Thomas Boonstra is a key figure in the realm of integrated circuit technology, with his patents reflecting a commitment to enhancing the reliability of electronic devices. His contributions are vital for the ongoing evolution of semiconductor manufacturing processes.