Thomas Andre Casavant

Title: Thomas Andre Casavant: Innovator in Overlay Metrology

Introduction

Thomas Andre Casavant is a notable inventor based in Cupertino, CA. He has made significant contributions to the field of metrology, particularly with his innovative patent related to overlay technology. His work is instrumental in enhancing the precision of measurements in various applications.

Latest Patents

Thomas holds a patent for a device titled "Dark field diffraction based overlay." This metrology device illuminates an overlay target featuring at least three pads for an axis, each with different programmed offsets. The device utilizes two obliquely incident beams of light from opposite azimuth angles or normally incident light to collect two dark field images of the overlay target. These images produce at least six independent signals, which are crucial for determining overlay errors along the axis.

Career Highlights

Throughout his career, Thomas has been associated with Nanometrics Inc., where he has applied his expertise in metrology. His innovative approach has led to advancements in the accuracy of overlay measurements, which are vital in semiconductor manufacturing and other high-precision industries.

Collaborations

Thomas has collaborated with esteemed colleagues such as Hwan J Jeong and Silvio J Rabello. Their combined efforts have contributed to the development of cutting-edge technologies in the field of metrology.

Conclusion

Thomas Andre Casavant is a distinguished inventor whose work in overlay metrology has paved the way for improved measurement techniques. His contributions continue to influence the industry positively.