Company Filing History:
Years Active: 2000
Title: Inventor Thom Kobayashi: Innovating Chemical Mechanical Polishing
Introduction
Thom Kobayashi is an accomplished inventor based in Austin, TX, known for his contributions to the field of chemical mechanical polishing (CMP). With a significant patent to his name, Kobayashi has made advancements that enhance the precision of polishing processes in the semiconductor industry.
Latest Patents
Kobayashi holds a patent for a low selectivity chemical mechanical polishing process. This innovative method is designed for polishing a metal layer that contains a combination of wide features, low density features, and high density features. The patent reveals a hydrophilic polish pad with a shore D hardness of greater than 50, utilized alongside a slurry containing silica and an acidic-based oxidizer, such as oxadic acid. This CMP process yields a selectivity ratio of less than 5:1 and preferably 1:1, enabling the metal layer to be polished below the surface of the surrounding oxide while maintaining precise control over the polishing duration.
Career Highlights
Kobayashi's career is highlighted by his work at Motorola Corporation, where he focuses on innovations in polishing technology. His expertise in CMP has positioned him as a valuable asset within the company, allowing for advances that are critical to the manufacturing of semiconductor devices.
Collaborations
Throughout his career, Thom Kobayashi has collaborated with notable colleagues, including Rajeev Bajaj and Subramoney V Iyer. These partnerships have facilitated the exchange of ideas and enhanced the development of innovative techniques in the semiconductor processing field.
Conclusion
Thom Kobayashi exemplifies the spirit of innovation through his contributions to chemical mechanical polishing technology. With his patented methods and collaboration within the industry, he continues to drive advancements that improve the efficiency and effectiveness of semiconductor manufacturing processes. His work is a testament to the vital role inventors play in technological progress.