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Tetsuya Tahara

USPTO Granted Patents = 7

Average Co-Inventor Count = 5.0

ph-index = 5

Forward Citations = 46(Granted Patents)

Company Filing History:

7 out of 42,508

Years Active: 2000-2005

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6941185 - Operating method of vacuum processing system and vacuum processing system (2005-09-06),

2. 6917844 - Vacuum process apparatus and method of operating the same (2005-07-12),

3. 6885906 - Operating method of vacuum processing system and vacuum processing system (2005-04-26),

4. 6853872 - Operating method of vacuum processing system and vacuum processing system (2005-02-08),

5. 6745093 - Vacuum process apparatus and method of operating the same (2004-06-01),

6. 6714832 - Operating method of vacuum processing system and vacuum processing system (2004-03-30),

7. 6069096 - Operating method of vacuum processing system and vacuum processing system (2000-05-30),

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