Te-Hse Terrence Lee

Title: Te-Hse Terrence Lee: Innovator in MEMS-CMOS Technology

Introduction

Te-Hse Terrence Lee is a prominent inventor based in San Jose, CA. He has made significant contributions to the field of micro-electromechanical systems (MEMS) and complementary metal-oxide-semiconductor (CMOS) technology. With a total of 2 patents, his work focuses on enhancing the integration of MEMS and CMOS devices.

Latest Patents

One of his latest patents involves methods and structures for integrated MEMS-CMOS devices. This innovative method utilizes a micro-fabrication process that allows for the realization of moving mechanical structures (MEMS) on top of a conventional CMOS structure. The process includes bonding a mechanical structural wafer on top of the CMOS and etching the mechanical layer using plasma etching processes, such as Deep Reactive Ion Etching (DRIE). During this etching process, CMOS devices that are directly connected to the mechanical layer can be exposed to plasma, which may cause permanent damage known as Plasma Induced Damage (PID). Lee's invention presents methods and structures to prevent or reduce PID, thereby protecting the underlying CMOS circuits by grounding and providing an alternate path for the CMOS circuits until the MEMS layer is completely etched.

Career Highlights

Te-Hse Terrence Lee is currently employed at Mcube, Inc., where he continues to innovate in the field of MEMS and CMOS integration. His expertise and contributions have positioned him as a key figure in advancing technology in this area.

Collaborations

Throughout his career, Lee has collaborated with notable colleagues, including Sudheer S Sridharamurthy and Ali J Rastegar. These collaborations have further enriched his work and expanded the impact of his inventions.

Conclusion

Te-Hse Terrence Lee is a distinguished inventor whose work in MEMS-CMOS technology has led to significant advancements in the field. His innovative methods and structures are paving the way for future developments in integrated devices.