Tatsuyuki Urata

Title: Innovations of Tatsuyuki Urata

Introduction

Tatsuyuki Urata is a notable inventor based in Fukuoka, Japan. He has made significant contributions to the field of alignment apparatuses, particularly in the context of substrate and focus ring transport. His innovative approach has led to the development of a unique patent that enhances precision in manufacturing processes.

Latest Patents

One of Tatsuyuki Urata's key patents is titled "Alignment and transport of substrate and focus ring." This patent describes an alignment apparatus that includes a rotational support designed to rotate around a central axis. The apparatus features a rotation actuator, an edge sensor, and control circuitry. The rotational support is equipped with substrate supports that can concurrently hold a substrate, as well as ring supports for a focus ring. The rotation actuator is responsible for rotating the support around the central axis. The edge sensor generates an edge signal that varies according to the edge positions of both the substrate and the focus ring. The control circuitry utilizes this edge signal to adjust the postures of both the substrate and the focus ring to their respective target positions.

Career Highlights

Throughout his career, Tatsuyuki Urata has focused on enhancing the efficiency and accuracy of alignment processes in various applications. His work has been instrumental in advancing technologies that require precise positioning of components. With a patent portfolio that includes 1 patent, he has established himself as a key figure in his field.

Collaborations

Tatsuyuki Urata has collaborated with fellow inventor Keisuke Yoshino, contributing to the development of innovative solutions in alignment technology. Their partnership has fostered advancements that benefit various industries reliant on precision engineering.

Conclusion

Tatsuyuki Urata's contributions to the field of alignment apparatuses demonstrate his commitment to innovation and precision. His patent on the alignment and transport of substrates and focus rings showcases his ability to address complex engineering challenges. Through his work, he continues to influence the landscape of manufacturing technology.