Company Filing History:
Years Active: 2013-2025
Title: Tatsuya Nakamura: Innovator in Electrostatic Technology
Introduction
Tatsuya Nakamura is a prominent inventor based in Nagano, Japan. He has made significant contributions to the field of electrostatic technology, holding a total of four patents. His innovative designs have advanced the capabilities of substrate fixing devices, which are essential in various industrial applications.
Latest Patents
Nakamura's latest patents include an electrostatic chuck and a substrate fixing device. The electrostatic chuck features a ceramic plate, an adsorption electrode, a ground electrode, and wiring. The adsorption electrode is integrated near one surface of the ceramic plate, while the ground electrode is positioned within the ceramic plate, allowing for a connection to ground potential. The wiring extends from the ground electrode to the surface of the ceramic plate. His substrate fixing device includes a base plate with a refrigerant flow path, designed to enhance the efficiency of the electrostatic chuck. The inner wall of the refrigerant flow path is uniquely shaped to optimize refrigerant flow.
Career Highlights
Nakamura has built a successful career at Shinko Electric Industries Co., Ltd., where he has been instrumental in developing cutting-edge technologies. His work has not only contributed to the company's success but has also positioned him as a leader in the field of electrostatic devices.
Collaborations
Throughout his career, Nakamura has collaborated with talented individuals such as Tomoko Yamada and Ken Sato. These partnerships have fostered innovation and have led to the successful development of various technologies.
Conclusion
Tatsuya Nakamura's contributions to electrostatic technology exemplify his dedication to innovation and excellence. His patents and collaborative efforts continue to influence the industry, showcasing the importance of creativity in engineering.