Tatsuya Mori

Title: Tatsuya Mori: Innovator in Electrostatic Chuck Technology

Introduction

Tatsuya Mori is a prominent inventor based in Kitakyushu, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 6 patents. His work has been instrumental in advancing the efficiency and functionality of processing apparatuses.

Latest Patents

Mori's latest patents include innovative designs for electrostatic chucks. One embodiment describes an electrostatic chuck that features a ceramic dielectric substrate, a base plate, and a first porous part. The ceramic dielectric substrate has first and second major surfaces, with the second major surface opposite to the first. The base plate supports the ceramic dielectric substrate and includes a gas feed channel. The first porous part is positioned in the ceramic dielectric substrate, opposite the gas feed channel, and consists of a first porous region and a first dense region. The first porous region contains sparse portions with pores, while the first dense portion is strategically placed between these sparse portions. Another patent outlines a similar electrostatic chuck design, emphasizing the importance of the ceramic dielectric substrate and the gas feed channel in enhancing performance.

Career Highlights

Mori is currently associated with Toto Ltd., a company known for its innovative products in the sanitary ware industry. His work at Toto Ltd. has allowed him to focus on developing advanced technologies that improve manufacturing processes and product quality.

Collaborations

Mori has collaborated with notable colleagues, including Jun Shiraishi and Shuichiro Saigan. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Tatsuya Mori's contributions to electrostatic chuck technology exemplify his dedication to innovation in engineering. His patents reflect a deep understanding of materials and design, positioning him as a key figure in his field.