Miyagi, Japan

Tatsuru Okamura

USPTO Granted Patents = 1 

Average Co-Inventor Count = 4.0

ph-index = 1


Company Filing History:


Years Active: 2025

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1 patent (USPTO):Explore Patents

Title: Innovations of Tatsuru Okamura

Introduction

Tatsuru Okamura is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing systems. His innovative work has led to the development of a patented technology that enhances the efficiency of substrate processing.

Latest Patents

Tatsuru Okamura holds a patent for a "Substrate processing system and method of estimating height of annular member." This patent describes a substrate processing apparatus that includes a stage for placing a substrate and an annular member. The system features a substrate transport mechanism with a substrate holder and a distance sensor. The control device estimates the height of the annular member based on measurements taken by the distance sensor. This innovation is crucial for improving the accuracy and reliability of substrate processing.

Career Highlights

Tatsuru Okamura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to collaborate with other talented professionals in the field.

Collaborations

Some of his notable coworkers include Toshiaki Kodama and Shinji Wakabayashi. Their combined expertise contributes to the advancement of technology in substrate processing.

Conclusion

Tatsuru Okamura's contributions to substrate processing technology exemplify the impact of innovation in the semiconductor industry. His patented system showcases the importance of precision in manufacturing processes.

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