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Tatsuhisa Matsunaga

USPTO Granted Patents = 8

Average Co-Inventor Count = 3.3

ph-index = 6

Forward Citations = 1,346(Granted Patents)

Location History:

Fujisawa, JP (2007)
Tokyo, JP (2003 - 2011)

Company Filing History:

Hitachi-Kokusai Electric Inc.

Years Active: 2003-2011

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. RE43023 - Dual loading port semiconductor processing equipment (2011-12-12),

2. 7198447 - Semiconductor device producing apparatus and producing method of semiconductor device (2007-04-03),

3. 6927165 - Method and apparatus for processing substrates and method for manufacturing a semiconductor device (2005-08-09),

4. 6737613 - Heat treatment apparatus and method for processing substrates (2004-05-18),

5. 6658321 - Substrate processing method and apparatus (2003-12-02),

6. 6641350 - Dual loading port semiconductor processing equipment (2003-11-04),

7. 6638860 - Method and apparatus for processing substrates and method for manufacturing a semiconductor device (2003-10-28),

8. 6540469 - Substrate processing apparatus (2003-04-01),

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