Tamarak Pandhumsoporn

Title: Innovations of Tamarak Pandhumsoporn

Introduction

Tamarak Pandhumsoporn is a notable inventor based in Fremont, California. He has made significant contributions to the field of substrate processing systems, holding a total of eight patents. His work has advanced the technology used in various industrial applications.

Latest Patents

Among his latest patents is a substrate processing system that includes a coil with an RF powered Faraday shield. This innovative system features a processing chamber with a dielectric window and a substrate support designed to hold a substrate. The coil is strategically placed outside the processing chamber, adjacent to the dielectric window, with a Faraday shield positioned between them. An RF generator supplies power to the coil, which is coupled to the Faraday shield through stray capacitance or direct coupling. Additionally, a capacitor is connected to either the coil or the Faraday shield to adjust the position of a voltage standing wave along the coil. Another significant patent is for an edge ring assembly that improves feature profile tilting at the extreme edge of a wafer. This assembly includes an upper edge ring surrounding an electrostatic chuck, a lower inner edge ring made from electrically conductive material, and a lower outer edge ring composed of electrically insulating material.

Career Highlights

Tamarak has worked with prominent companies in the technology sector, including Lam Research Corporation and Alcatel. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in substrate processing technology.

Collaborations

Throughout his career, Tamarak has collaborated with notable colleagues such as Alferd Cofer and William Frederick Bosch. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Tamarak Pandhumsoporn's contributions to substrate processing systems exemplify his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in his field.