Takeshi Soma

Title: Innovations by Takeshi Soma in Polishing Pad Technology

Introduction

Takeshi Soma is a notable inventor based in Saitama, Japan. He has made significant contributions to the field of semiconductor manufacturing through his innovative inventions. With a total of 2 patents, his work focuses on enhancing the precision and efficiency of polishing pad technology.

Latest Patents

Takeshi Soma's latest patents include a polishing pad surface shape measuring instrument and methods related to its use. His inventions encompass various techniques for measuring the apex angle of a cone of polishing pads, the depth of grooves in polishing pads, and the operation of CMP polishers. The primary sensor in his measuring instrument assesses the distance to the pad's surface, while a secondary sensor measures the distance to a reference block. This dual measurement approach allows for accurate readings, even when the movable element's position fluctuates due to potential deformations in the guiding and holding plate. The motor-driven ball screw mechanism facilitates the leftward and rightward movement of the measuring element, enabling precise determination of the pad's vertical angle, groove depth, and thickness.

Career Highlights

Throughout his career, Takeshi Soma has worked with prominent companies such as Nikon Corporation and Ebara Corporation. His experience in these organizations has contributed to his expertise in the field of semiconductor device manufacturing and polishing technology.

Collaborations

Some of his notable coworkers include Toshihisa Tanaka and Atsushi Tanaka. Their collaborative efforts have likely played a role in advancing the innovations within their respective fields.

Conclusion

Takeshi Soma's contributions to polishing pad technology demonstrate his commitment to innovation in semiconductor manufacturing. His patents reflect a deep understanding of the complexities involved in achieving precision in this critical area.