This inventor holds 4 USPTO granted patents. Top assignee: Nec Corporation. Active years: 1995-2010.
Company Filing History:
Years Active: 1995-2010
Title: Innovations of Takeshi Bashomatsu
Introduction
Takeshi Bashomatsu is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of optical inspection technology. With a total of 4 patents, his work has advanced the methods used in the inspection of reticles and other optical components.
Latest Patents
One of his latest patents is the "Optical exterior inspection apparatus and method." This invention involves storing an inspected object, such as a reticle, in an immersion cassette filled with a liquid that has a specific refraction factor. An inspection beam is directed toward the object, which is precisely positioned via an objective lens while being refracted by the liquid. This process produces both a reflected inspection beam and a transmitted inspection beam. Image processing is then performed based on these beams to create an inspected image, which is compared with a prescribed circuit pattern to identify any foreign matter or structural defects. This innovation allows for an adequate focal depth while achieving high resolution in imaging.
Another notable patent is the "Reticle fabrication method." In this process, CAD data representing reticle design is input into two data conversion devices that convert the CAD data into electron beam (EB) write data and inspection data. These outputs are verified for data conversion errors before an EB writing device writes a pattern on an unwritten reticle. This method simplifies the reticle inspection process and reduces fabrication costs by detecting defects before the reticle is fabricated.
Career Highlights
Takeshi Bashomatsu is currently employed at NEC Corporation, where he continues to innovate in the field of optical technologies. His work has not only contributed to the efficiency of reticle fabrication but has also enhanced the quality of optical inspections.
Collaborations
He has collaborated with notable coworkers, including Takashi Yoshimura and Yasuo Nishijima, who have also contributed to advancements in optical technologies.
Conclusion
Takeshi Bashomatsu's contributions to optical inspection technology through his innovative patents have significantly impacted the industry. His work at NEC Corporation and collaborations with other experts highlight his commitment to advancing technology in this field.