Sagamihara, Japan

Takeo Oomori


Average Co-Inventor Count = 2.4

ph-index = 6

Forward Citations = 89(Granted Patents)


Location History:

  • Katsushika-ku, JP (2004)
  • Hachioji, JP (2003 - 2011)
  • Tokyo, JP (2010 - 2013)
  • Sagamihara, JP (2007 - 2014)

Company Filing History:


Years Active: 2003-2014

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19 patents (USPTO):Explore Patents

Title: Takeo Oomori: Innovator in Surface Inspection Technologies

Introduction

Takeo Oomori is a distinguished inventor based in Sagamihara, Japan. With a remarkable portfolio consisting of 19 patents, Oomori has significantly contributed to advancements in surface inspection technologies within the semiconductor industry.

Latest Patents

Among his notable contributions, two of his latest patents include a surface inspection apparatus and a surface inspection method. This innovative apparatus addresses the challenge of securely inspecting finer repetition pitch without the need to shorten the wavelength of illumination light. It incorporates a system that illuminates repetitive patterns on a substrate using linearly polarized light. This technology improves defect detection by extracting and analyzing the polarized light component perpendicular to the vibration plane, leading to enhanced accuracy in identifying defects of the repetitive patterns.

In addition, his patent for a defect inspection apparatus elaborates on methods to inspect defects in substrates. This includes an illumination optical system for effective lighting and a receiving optical system aimed at accurately capturing diffracted light from the substrate. A polarizing element is also utilized in this setup to heighten the precision of defect inspection.

Career Highlights

Oomori's career is marked by his tenure at Nikon Corporation, a global leader in imaging and optical products. His work emphasizes innovation in optical inspection technologies, catering to a rapidly evolving industry where precision and accuracy are paramount.

Collaborations

Oomori has collaborated with notable coworkers such as Kazuhiko Fukazawa and Koichiro Komatsu. These partnerships contribute to the synergy needed for groundbreaking advancements in their field, combining expertise to push the boundaries of current technologies.

Conclusion

In summary, Takeo Oomori's contributions to surface inspection technology demonstrate his commitment to innovation within the engineering and semiconductor sectors. With each patent, he aids in the ongoing development of precise inspection methods that are crucial for the advancement of modern technology. His work not only enhances product quality but also drives the future landscape of optical inspection systems.

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