The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Jun. 13, 2005
Takeo Oomori, Sagamihara, JP;
Hideo Hirose, Shiraoka-machi, JP;
Yasuharu Nakajima, Yokohama, JP;
Kenzo Chiaki, Kawasaki, JP;
Tatsumi Satou, Kawasaki, JP;
Takeo Oomori, Sagamihara, JP;
Hideo Hirose, Shiraoka-machi, JP;
Yasuharu Nakajima, Yokohama, JP;
Kenzo Chiaki, Kawasaki, JP;
Tatsumi Satou, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.