Company Filing History:
Years Active: 2013
Title: Takehiro Shindou: Innovator in Polymer Removal Technology
Introduction
Takehiro Shindou is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of polymer removal technology, holding a total of 3 patents. His innovative approaches have the potential to enhance various industrial processes.
Latest Patents
One of Shindou's latest patents is a polymer removing apparatus and method. This apparatus is designed to remove polymer that is annularly adhered to the peripheral portion of a target substrate. It features a processing chamber for accommodating the target substrate, a mounting table for securing the substrate, and a laser irradiation unit that emits ring-shaped laser light to effectively target the polymer. Additionally, the apparatus includes an ozone gas supply unit to introduce ozone gas to the polymer and a gas exhaust unit for removing the ozone gas.
Another significant patent is related to an ozone gas concentration measurement method and system. This method allows for the easy measurement of ozone gas concentration by producing a process gas from a raw gas containing oxygen. The concentration of ozone gas is calculated based on the number of moles of gas molecules in the process gas.
Career Highlights
Takehiro Shindou is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing advanced technologies that improve manufacturing processes and efficiency.
Collaborations
Shindou collaborates with fellow inventor Masaki Kondo, contributing to innovative projects and advancements in their field.
Conclusion
Takehiro Shindou's contributions to polymer removal technology and ozone gas measurement methods highlight his role as a significant inventor in the industry. His work continues to influence advancements in manufacturing processes and environmental safety.