Company Filing History:
Years Active: 1998-2002
Title: Takashi Matsuoka: Innovator in Photolithographic Technology
Introduction
Takashi Matsuoka is a prominent inventor based in Annaka, Japan. He has made significant contributions to the field of photolithography, particularly in the development of pellicles used in the manufacturing of electronic devices. With a total of 2 patents to his name, Matsuoka's work has been instrumental in enhancing the efficiency and effectiveness of photomask protection.
Latest Patents
Matsuoka's latest patents include innovative designs for pellicles that improve both impurity-trapping and ventilating performance. One of his notable inventions is a pellicle with a filter that features a pellicle frame equipped with vents for atmospheric pressure control. This design allows for the restoration of a pellicle film that swells during the attachment process, ensuring optimal performance under varying pressure conditions. Another significant patent is the frame-supported dustproof pellicle, which addresses the challenges of dust particle deposition on photomasks during the photolithographic patterning process. This invention not only enhances dust protection but also reduces the costs associated with pellicle preparation.
Career Highlights
Matsuoka is currently employed at Shin-Etsu Chemical Co., Ltd., where he continues to innovate in the field of photolithography. His work has been recognized for its practical applications in the manufacturing of electronic fine devices, such as LSIs and VLSIs. Matsuoka's contributions have helped to advance the technology used in the semiconductor industry.
Collaborations
Throughout his career, Matsuoka has collaborated with notable colleagues, including Meguru Kashida and Yuichi Hamada. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Takashi Matsuoka's contributions to the field of photolithography through his innovative patents have significantly impacted the manufacturing processes of electronic devices. His work continues to pave the way for advancements in technology and efficiency in the industry.