Takashi Hasegawa

Title: Takashi Hasegawa: Innovator in Plasma Processing Technology

Introduction

Takashi Hasegawa is a prominent inventor based in Miyagi, Japan. He is known for his contributions to the field of plasma processing technology. His innovative work has led to the development of a significant patent that enhances the efficiency of plasma processing apparatuses.

Latest Patents

Hasegawa holds a patent for a plasma processing apparatus. This apparatus includes a microwave output unit, a wave guide tube, a tuner, a demodulation unit, and a calculation unit. The microwave output unit is designed to output a microwave with power corresponding to the setting power while frequency-modulating the microwave within a specified frequency range. The wave guide tube effectively guides the microwave to an antenna of the chamber's main body. The tuner, located in the wave guide tube, adjusts the position of a movable plate. The demodulation unit acquires travelling wave power and reflected wave power for each frequency, while the calculation unit determines the absorption frequency by calculating the reflection coefficient based on these powers.

Career Highlights

Hasegawa is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies, which are crucial for various applications in electronics.

Collaborations

Hasegawa has collaborated with notable colleagues, including Kazushi Kaneko and Koji Koyama. Their teamwork has contributed to the innovative developments in plasma processing technology.

Conclusion

Takashi Hasegawa's contributions to plasma processing technology through his patent and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.