Company Filing History:
Years Active: 2003
Title: Takaomi Ito: Innovator in Electron Beam Lithography
Introduction
Takaomi Ito is a prominent inventor based in Tokyo, Japan. He is known for his significant contributions to the field of electron beam lithography. His innovative work has led to the development of advanced technologies that enhance the precision and speed of lithographic processes.
Latest Patents
Takaomi Ito holds a patent for an "Electron beam lithography system and method." This invention involves a unique approach where an outputted main signal is applied directly to deflection plates, while an auxiliary signal is applied through capacitive coupling. This method allows for the accurate writing of wide strip-like patterns at high speeds. The system divides the deflection signal into a low-frequency, large-amplitude main signal and a high-frequency, small-amplitude auxiliary signal. This innovative technique enables the writing of lines and graphic patterns with widths significantly larger than the electron beam diameter.
Career Highlights
Throughout his career, Takaomi Ito has made notable advancements in the field of lithography. His work at Elionix Inc. has positioned him as a key player in the development of cutting-edge lithographic technologies. His expertise and innovative mindset have contributed to the evolution of electron beam lithography systems.
Collaborations
Takaomi Ito has collaborated with esteemed colleagues such as Masanao Hotta and Yasuhiko Kojima. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Takaomi Ito's contributions to electron beam lithography exemplify the impact of innovation in technology. His patented methods and collaborative efforts continue to influence the field, paving the way for future advancements.