This inventor holds 4 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2019-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Miyagi, JP (2019 - 2020)
- Yamanashi, JP (2020)
Company Filing History:
Years Active: 2019-2020
Title: Takahiro Hirano: Innovator in Plasma Processing Technology
Introduction
Takahiro Hirano is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 4 patents. His innovative work has advanced the capabilities of substrate processing apparatuses, which are essential in various manufacturing processes.
Latest Patents
Hirano's latest patents include a substrate processing apparatus and a plasma processing apparatus. The substrate processing apparatus features a rotatable placing table and a gas supplying section that facilitates the movement of substrates while generating plasma. This design incorporates an antenna that radiates microwaves and a coaxial waveguide that supplies these microwaves to the antenna. The unique configuration of the antenna enhances the efficiency of plasma generation.
The plasma processing apparatus, on the other hand, consists of a processing container that defines a processing space, a microwave generator for plasma excitation, and a dielectric with a slot plate that radiates microwaves into the processing space. This innovative design allows for effective plasma processing, which is crucial in various industrial applications.
Career Highlights
Takahiro Hirano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has positioned him as a key player in the development of advanced plasma processing technologies.
Collaborations
Hirano has collaborated with notable colleagues, including Toshihiko Iwao and Takaaki Kato. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the field.
Conclusion
Takahiro Hirano's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative designs continue to shape the future of substrate processing in the electronics industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile