Company Filing History:
Years Active: 2024-2025
Title: Takaaki Kikuchi: Innovator in Plasma Processing Technology
Introduction
Takaaki Kikuchi is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work has been instrumental in advancing the capabilities of plasma processing apparatuses.
Latest Patents
Kikuchi's latest patents include a plasma processing apparatus that features a table with a wafer support designed to hold a wafer. This apparatus includes a peripheral segment surrounding the wafer support, which has through-holes for enhanced functionality. The design incorporates an outer focus ring with a recess or cutout, allowing for the effective management of lift pins that extend through the apparatus. Another notable patent is for an edge ring that consists of a first and a second edge ring, which are designed to move vertically along each other. This innovative design improves the efficiency of substrate processing methods.
Career Highlights
Kikuchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to collaborate with other talented professionals in the field, further enhancing his contributions to technology.
Collaborations
Some of Kikuchi's notable coworkers include Takashi Taira and Shuichi Takahashi. Their collaborative efforts have played a crucial role in the development of advanced technologies in plasma processing.
Conclusion
Takaaki Kikuchi's innovative work in plasma processing technology has established him as a key figure in the industry. His patents reflect a commitment to enhancing the efficiency and effectiveness of semiconductor manufacturing processes.